Overview

Jointly funded by SRC and University of North Texas with an annual budget for at least three years of approximately $850,000, the mission of the Center for Electronic Material Processing and Integration (CEMPI) is to develop a fundamental understanding of plasma processing in general and specifically its effects, on low k dielectrics.

Research Focus

This center will focus on advanced plasma processes and low k dielectrics used in manufacturing state-of-the-art semiconductor chips. The research focus may expand to include both 3D and packaging tasks in the next couple years.

Center Management

The center will be led by Dr. Jeffry Kelber, a UNT professor of chemistry. Collaborating as part of the center will be a team of 12 researchers from UNT, the University of Maryland, the University of California at Berkeley, Rensselaer Polytechnic University, Pennsylvania State University, Columbia University, University of Texas at Arlington, University of Michigan and Arizona State University.