2025 Aristotle Award
Presented to Dr. Gregory Parsons of North Carolina State University

Recognizing faculty whose commitment to student education has made a lasting impact on SRC members, the 2025 Aristotle Award goes to Dr. Gregory Parsons (North Carolina State University). Prof. Parsons is internationally recognized for his advances in surface reaction engineering, particularly in thin film deposition, etching, and patterning for advanced electronic materials and devices. His work has elevated atomic-scale synthesis and processing, including reaction mechanisms for ALD, ALE, ASD, MLD, and related techniques.
Since the mid-1990s, Dr. Parsons has guided more than 50 PhD graduates, many supported through SRC research and education development programs. He fosters a collaborative research culture advancing surface chemical processes essential for future electronics and advanced materials. Prof. Parsons co-founded the AVS Atomic Layer Deposition Conference in 2001, now the field’s leading academic and industry forum, welcomingover 1,000 attendees in 2025. His leadership has shaped generations of researchers who now lead at top technology companies, national labs, and academic institutions. Prof. Parsons is a Fellow of the American Vacuum Society, recipient of the prestigious ALD Innovation Award, and a member of NC State’s Academy of Outstanding Teachers.
