- Monday 12-Sep-2016 3:40 - 4:55 PM Sabine
- 15.1 3:40 PM MSR-Intel
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PS-b-PMMA/Ionic Liquid Blends: A High-χ Drop-in Replacement for Sub-10 nm DSAXuanxuan Chen (Univ. of Chicago)
- 15.2 3:55 PM GRC
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3D Metrology for Graphoepitaxial DSA Hole Shrink ProcessChun Zhou (Univ. of Chicago)
- 15.3 4:10 PM GRC
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Polyoxometalate Hybrid Nano-Building Blocks for Extreme Ultra-Violet PhotoresistsBrandon T. Hardie (Univ. of Idaho)
- 15.4 4:25 PM GRC
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Characterization of HafSOx Inorganic Photoresists using Electron Stimulated Desorption and Raman SpectroscopyRyan Frederick (Oregon State Univ., Intel/SRCEA Fellow)
- 15.5 4:40 PM GRC
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Characterization of Butyl Tin PhotoresistsJohn T. Diulus (Oregon State Univ.)