Patterning Methods and Systems Using Reflected Interference Patterns

• Application Type:

  Foreign National

  Patent Number:

  NI-154578

  Country:

  Taiwan

  Status:

  Filed on 21-Feb-2001, Issued on 1-May-2002, Patent Abandoned

  Organization:

  University of Tennessee, Knoxville

  SRC Filing ID:

  P0267

Inventors

• Daniel J. C. Herr (SRC)
• David Joy (UT/Knoxville)