Solventless, Resistless, Direct Dielectric Patterning

    • Application Type:
      European Patent Office
      Patent Number:
      1269259
      Status:
      Filed on 11-Jan-2001, Issued on 8-Aug-2012, Patent Abandoned
      Organization:
      Mass. Institute of Technology
      SRC Filing ID:
      P0308

    Inventors

    • Karen K. Gleason (MIT)
    • Christopher K. Ober (Cornell)
    • Daniel J. C. Herr (SRC)

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