Solventless, Resistless, Direct Dielectric Patterning

• Application Type:

  European Patent Office

  Patent Number:

  1269259

  Status:

  Filed on 11-Jan-2001, Issued on 8-Aug-2012, Patent Abandoned

  Organization:

  Massachusetts Institute of Technology

  SRC Filing ID:

  P0308

Inventors

• Karen K. Gleason (MIT)
• Christopher K. Ober (Cornell)
• Daniel J. C. Herr (SRC)