Attenuated Phase Shift Mask and a Method for Making the Mask

• Application Type:

  Utility

  Patent Number:

  6309780

  Country:

  United States

  Status:

  Filed on 15-Jun-1999, Issued on 30-Oct-2001, Patent Expired

  Organization:

  Rochester Institute of Technology

  SRC Filing ID:

  P0380

Inventor

• Bruce W. Smith (RIT)