Attenuated Phase Shift Mask and a Method for Making the Mask

    • Application Type:
      Utility
      Patent Number:
      6309780
      Country:
      United States
      Status:
      Filed on 15-Jun-1999, Issued on 30-Oct-2001
      Organization:
      Rochester Institute of Technology
      SRC Filing ID:
      P0380

    Inventor

    • Bruce W. Smith (RIT)

    4819 Emperor Blvd, Suite 300 Durham, NC 27703 Voice: (919) 941-9400 Fax: (919) 941-9450

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