Elastomer Spatial Light Modulators for Extreme Ultraviolet Lithography

• Application Type:

  Utility

  Patent Number:

  7092138

  Country:

  United States

  Status:

  Filed on 8-Oct-2004, Issued on 15-Aug-2006, Patent Abandoned

  Organization:

  Stanford University

  SRC Filing ID:

  P0491

Inventors

• Olav Solgaard (Stanford)
• Jen-Shiang Wang (Stanford)
• Il Woong Jung (Stanford)