Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly

    • Application Type:
      Utility
      Patent Number:
      9183870
      Country:
      United States
      Status:
      Filed on 5-Dec-2008, Issued on 10-Nov-2015, Patent Abandoned
      Organization:
      University of Wisconsin - Madison
      SRC Filing ID:
      P1116

    Inventors

    • Paul Nealey (U of Wisconsin/Madison)
    • Huiman Kang (U of Wisconsin/Madison)
    • Francois Detcheverry (U of Wisconsin/Madison)
    • Juan de Pablo (U of Wisconsin/Madison)
    • Ricardo Ruiz (Hitachi Ltd.)
    • Thomas Albrecht (Hitachi Ltd.)

    Related Patents

    P1059
    Application Expired
    GRC

    Methods to Enhance and Augment the Patterning Capabilities of Lithographic Materials and Process Using Block Copolymers

    Thomas Albrecht (Hitachi Ltd.); Juan de Pablo (U of Wisconsin/Madison); Francois Detcheverry (U of Wisconsin/Madison); Huiman Kang (U of Wisconsin/Madison); Paul Nealey (U of Wisconsin/Madison); Ricardo Ruiz (Hitachi Ltd.)
    Patent Application Expired
    Application Type: Provisional
    P1096
    Application Expired
    GRC

    Patterning Beyond the Limits of Lithographic Resolution

    Thomas Albrecht (Hitachi Ltd.); Juan de Pablo (U of Wisconsin/Madison); Francois Detcheverry (U of Wisconsin/Madison); Huiman Kang (U of Wisconsin/Madison); Paul Nealey (U of Wisconsin/Madison); Ricardo Ruiz (Hitachi Ltd.)
    Patent Application Expired
    Application Type: Provisional
    P1132
    Issued
    GRC

    DENSITY MULTIPLICATION AND IMPROVED LITHOGRAPHY BY DIRECTED BLOCK COPOLYMER ASSEMBLY

    Thomas Albrecht (Hitachi Ltd.); Juan de Pablo (U of Wisconsin/Madison); Francois Detcheverry (U of Wisconsin/Madison); Huiman Kang (U of Wisconsin/Madison); Paul Nealey (U of Wisconsin/Madison); Ricardo Ruiz (Hitachi Ltd.)
    Patent Issued (on 17-Apr-2010)
    Application Type: Patent Cooperation Treaty

    INFORMATION

    FOR MEMBERS

    SRC VALUE

    ACADEMIA

    4819 Emperor Blvd, Suite 300 Durham, NC 27703 Voice: (919) 941-9400 Fax: (919) 941-9450

    © 2024 by Semiconductor Research Corporation ®
    Access to information on this website may be limited to member companies,
    participating agencies, and qualified researchers.

    Important Information for the SRC website. This site uses cookies to store information on your computer. By continuing to use our site, you consent to our cookies. If you are not happy with the use of these cookies, please review our Cookie Policy to learn how they can be disabled. By disabling cookies, some features of the site will not work.