Guided Self-Assembly of Block Copolymer Line Structures for Integrated Circuit Interconnects

    • Application Type:
      Utility
      Patent Number:
      8309278
      Country:
      United States
      Status:
      Filed on 17-Sep-2010, Issued on 13-Nov-2012, Patent Abandoned
      Organization:
      Massachusetts Institute of Technology
      SRC Filing ID:
      P1242

    Inventors

    • Karl Berggren (MIT)
    • Yeon Sik Jung (MIT)
    • Caroline Ross (MIT)
    • Joel Kwang Wei Yang (MIT)

    Related Patents

    P1236
    Application Expired
    GRC

    Guided Self-Assembly of Block Copolymer Line Structures for Integrated Circuit Interconnects

    Karl Berggren (MIT); Yeon Sik Jung (MIT); Caroline Ross (MIT); Joel Kwang Wei Yang (MIT)
    Patent Application Expired
    Application Type: Provisional

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