Method for In-Situ Dry Cleaning, Passivation, Functionalization of SI-GE Semiconductor Surfaces

    • Application Type:
      Utility
      Patent Number:
      9818599
      Country:
      United States
      Status:
      Filed on 24-Oct-2013, Issued on 14-Nov-2017
      Organization:
      University of California, San Diego
      SRC Filing ID:
      P1429

    Inventors

    • Tobin Kaufman-Osborn (UC/San Diego)
    • Andrew Kummel (UC/San Diego)
    • Kiarash Kiantaj (UC/San Diego)

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    Application Type: Divisional

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