Ge Based Nanoscale CMOS Devices and Circuits

  • Authors:
    Heng Wu (Purdue), Peide Ye (Purdue)
    Publication ID:
    Publication Type:
    Received Date:
    Last Edit Date:
    2288.001 (Purdue University)


This work presents new approaches investigated for future's post-Si technology based on Germanium by both experiments and TCAD simulations. A novel recessed S/D technique is introduced in the MOSFETs fabrication, greatly improving the n-Ge contacts. Low Rc of 0.05 and 0.23 Ω·mm are obtained for p- and n- contacts. For the first time, Ge nMOSFETs is scaled to sub-100 nm node down to 25 nm, with 4X record high Imax and gmax. The world's first CMOS circuits on Ge are demonstrated here through a novel recessed S/D and channel process. First sub-100 nm channel length and record high voltage gain of 36 V/V on non-Silicon substrate are achieved. Logic gates such as inverters, NANDs, NORs and ring oscillators are realized. Advanced gate structures such as ET-SOI, tri-gate and nanowire are further explored, showing much enhanced short channel effect immunity. First 3D FinFETand nanowire CMOScircuit on Ge are also demonstrated.

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