Coherent Ptychographic Imaging Microscope With 17.5nm Spatial Resolution Employing 13.5nm High Harmonic Light

  • Authors:
    Michael Tanksalvala (U. of Colorado/Boulder), Dennis F. Gardner (U. of Colorado/Boulder), Giulia F. Mancini (U. of Colorado/Boulder), Elisabeth R. Shanblatt (U. of Colorado/Boulder), Xiaoshi Zhang (Kapteyn-Murnane Laboratories), Benjamin Galloway (U. of Colorado/Boulder), Christina L. Porter (U. of Colorado/Boulder), Robert M. Karl (U. of Colorado/Boulder), Charles Bevis (U. of Colorado/Boulder), Margaret Murnane (U. of Colorado/Boulder), Henry Kapteyn (U. of Colorado/Boulder), Daniel Adams (U. of Colorado/Boulder)
    Publication ID:
    Publication Type:
    Received Date:
    Last Edit Date:
    2443.001 (University of Colorado/Boulder)


In this work, a tabletop transmission-mode ptychographic microscope which uses coherent 13.5 nm Extreme Ultraviolet light is demonstrated. An image of a fresnel zone plate taken using this microscope is presented and compared to one taken with a scanning electron microscope. The new ptychographic microscope has a numerical aperture of .4 and demonstrates 17.5nm resolution. The source is an actively-stabilized 20fs, 2mJ, 3kHz, Ti:Sapphire laser with 785nm center wavelength focused into a 150um Helium-filled hollow-core optical fiber. The harmonics are focused using an off-axis spherical mirror.

4819 Emperor Blvd, Suite 300 Durham, NC 27703 Voice: (919) 941-9400 Fax: (919) 941-9450

Important Information for the SRC website. This site uses cookies to store information on your computer. By continuing to use our site, you consent to our cookies. If you are not happy with the use of these cookies, please review our Cookie Policy to learn how they can be disabled. By disabling cookies, some features of the site will not work.