Physical Characterization of 2D Device Materials: Challenges and Opportunities

  • Authors:
    Robert M. Wallace (UT/Dallas)
    Publication ID:
    Publication Type:
    Received Date:
    Last Edit Date:
    2383.001 (University of Texas/Dallas)
    2400.009 (University of Texas/Austin)


A variety of materials are now under investigation for advanced device concepts and applications. In addition to establishing materials properties in the context of device physics and potential performance, an understanding of the integration constraints and the impact on the materials interfaces must also be addressed, as interfaces with contacts and dielectrics dominate device characteristics. This tutorial will focus on the physical characterization aspects of 2D materials, as well as the role of impurities and defects in these materials. Topics in advanced device materials development and metrology to be covered include:
1. Detection limits of characterization techniques
2. In-situ vs. ex-situ characterization
3. Surface and interface analysis methods
4. Electron and ion mass spectrometry methods

The physics of the characterization/metrology techniques will be discussed, and examples of correlating such physical and chemical materials characterization to device behavior will also be presented.

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