Final Report on Effects of Pt/Pd Adatoms on Silicides Phases in Silicon Nanowires

  • Authors:
    Yu Huang (UCLA)
    Publication ID:
    P090070
    Publication Type:
    Deliverable Report
    Received Date:
    11-Jan-2017
    Last Edit Date:
    7-Feb-2017
    Research:
    2477.001 (University of California/Los Angeles)

Research Report Highlight

To create NiSi nanowires, the use of Pt or Pd to suppress the formation of the phases with low solubility (e.g. NiSi2), and a compressive Al2O3 outer shell to hinder the growth of silicides with large volume expansion during silicidation were explored.

Abstract

This report summarizes the goals, outcomes and challenges of the task, and the plan to overcome the technical obstacles in order to move the project forward.

4819 Emperor Blvd, Suite 300 Durham, NC 27703 Voice: (919) 941-9400 Fax: (919) 941-9450