WSe2–Contact Metal Interface Chemistry and Band Alignment under High Vacuum and Ultra High Vacuum Deposition Conditions

  • Authors:
    Christopher M. Smyth (UT/Dallas), Rafik Addou (UT/Dallas), Stephen McDonnell (UT/Dallas), Christopher Hinkle (UT/Dallas), Robert M. Wallace (UT/Dallas)
    Publication ID:
    P090205
    Publication Type:
    Paper
    Received Date:
    3-Feb-2017
    Last Edit Date:
    11-Apr-2017
    Research:
    2383.001 (University of Texas/Dallas)
    2400.009 (University of Texas/Austin)

Abstract

Contact metals (Au, Ir, and Cr) are deposited on bulk WSe2 under ultra–high vacuum (UHV, 1 × 10(-9) mbar) and high vacuum (HV, 5 × 10(-6) mbar) conditions and subsequently characterized with X–ray photoelectron spectroscopy (XPS) to elucidate the effects of reactor base pressure on resulting interface chemistry, contact chemistry, and band alignment.

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