Report on Self-aligned DSA of Multi-color Manufacturing-relevant Patterns Including Fabrication and Simulation of Bottom Patterned Contact Holes as well as Synthesis and First DSA of Triblock Copolymers

  • Authors:
    Paul Nealey (Univ. of Chicago)
    Publication ID:
    P090273
    Publication Type:
    Deliverable Report
    Received Date:
    8-Feb-2017
    Last Edit Date:
    20-Mar-2017
    Research:
    2673.001 (University of Chicago)

Research Report Highlight

This report explains self-aligned DSA of multi-color manufacturing-relevant patterns including fabrication and simulation of bottom patterned contact holes as well as synthesis and first DSA of triblock copolymers.

Abstract

This report explains self-aligned DSA of multi-color manufacturing-relevant patterns including fabrication and simulation of bottom patterned contact holes as well as synthesis and first DSA of triblock copolymers.

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