Proposal Research Overview for Decoupled Process Sequences/Surface Chemistries Enabling Atomic Layer Etching of Critical Materials

  • Authors:
    Gottlieb Oehrlein (UM/College Park)
    Publication ID:
    P090593
    Publication Type:
    Proposal Overview
    Received Date:
    27-Mar-2017
    Last Edit Date:
    27-Mar-2017
    Research:
    2726.001 (University of Maryland/College Park)

Abstract

This report is the research overview for task 2726.001 titled "Decoupled Process Sequences/Surface Chemistries Enabling Atomic Layer Etching of Critical Materials".

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