Proposal Research Overview for Orthogonal Dielectric/Metal Selective Area Atomic Layer Deposition

  • Authors:
    Gregory Parsons (NC State)
    Publication ID:
    P090594
    Publication Type:
    Proposal Overview
    Received Date:
    27-Mar-2017
    Last Edit Date:
    27-Mar-2017
    Research:
    2729.001 (North Carolina State University)

Abstract

This report is the research overview for task 2729.001 titled "Orthogonal Dielectric/Metal Selective Area Atomic Layer Deposition".

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