Final Report on In situ STM Characterization of ALD Nucleation

  • Authors:
    Yonas Yemane (Stanford), Ming Rue Dickson Thian (Stanford), Friedrich B. Prinz (Stanford)
    Publication ID:
    Publication Type:
    Deliverable Report
    Received Date:
    Last Edit Date:
    2454.001 (Stanford University)

Research Report Highlight

This final report outlines research accomplishments in development of in-situ STM for characterization of ALD nucleation. Examples of Cu and Ru ALD were used to show the capability.


This final report outlines research accomplishments and plans for future work.

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