Final Report on In situ STM Characterization of ALD Nucleation

  • Authors:
    Yonas Yemane (Stanford), Ming Rue Dickson Thian (Stanford), Friedrich B. Prinz (Stanford)
    Publication ID:
    P090634
    Publication Type:
    Deliverable Report
    Received Date:
    31-Mar-2017
    Last Edit Date:
    5-May-2017
    Research:
    2454.001 (Stanford University)

Research Report Highlight

This final report outlines research accomplishments in development of in-situ STM for characterization of ALD nucleation. Examples of Cu and Ru ALD were used to show the capability.

Abstract

This final report outlines research accomplishments and plans for future work.

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