Investigation of Speciation in III‐V Wet Etching to Mitigate Hazardous Product Formation

  • Authors:
    Anthony J. Muscat (Univ. of Arizona), Srini Raghavan (Univ. of Arizona)
    Publication ID:
    P090678
    Publication Type:
    Annual Review
    Received Date:
    10-Apr-2017
    Last Edit Date:
    5-May-2017
    Research:
    425.049 (University of Arizona)

Abstract

This annual report outlines research accomplishments and plans for future work.

Past Events

  Event Summary
12–13 April 2017
GRC
GRC
ESH Review and (by invitation only) ESH Aspects of Semiconductor Manufacturing Research Needs and Opportunities Workshop
Wednesday, April 12, 2017, 8 a.m. — Thursday, April 13, 2017, 5 p.m. PT
Tucson, AZ, United States
The ESH review is being held to provide an annual contract review and project guidance by GRC Members within the ESH thrust of NMS. Additionally, an invitation only 1.5 day ...

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