Report on Assessing the Performance

  • Authors:
    Irfan A. Saadat (Masdar Inst.)
    Publication ID:
    P091004
    Publication Type:
    Deliverable Report
    Received Date:
    28-May-2017
    Last Edit Date:
    19-Jun-2017
    Research:
    2440.004 (Masdar Institute)

Research Report Highlight

This report presents the results of the mechanical performance of the Al doped ALD ZnO film. This covers the design and fabrication of the test structures, the special jig to conduct the stress/strain assessment and then extraction of the gauge factor.

Abstract

This report presents the results of the mechanical performance of the Al doped ALD ZnO film. This covers the design and fabrication of the test structures, the special jig to conduct the stress/strain assessment and then extraction of the gauge factor.

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