Selective Spin-on Deposition of Polymers
This presentation details initial efforts in developing materials, processes, and characterization techniques that facilitate the selective deposition of polymers by spin coating. A polystyrene/poly(2-vinylpyridine) blend model system is used to interrogate substrate affinity with four surfaces of interest to SRC: copper, silicon dioxide, silicon nitride, and titanium nitride. Optimization of deposition conditions has produced vertical phase separation on each surface. Secondary ion mass spectrometry, attenuated total reflection infrared spectroscopy, and atomic force microscopic are consistent with P2VP substrate affinity and appear capable of interrogating film composition and/or selectivity. The efficacy of the experimental design and characterization methodologies described herein lay the groundwork to extend analysis of spin-on selectivity to other polymers and processing conditions.
|Nanomanufacturing Materials and Processes (NMP) Review|
Tuesday, June 27, 2017, 8 a.m. — Wednesday, June 28, 2017, 5 p.m. PT
Stanford, CA, United States