Selective Spin-on Deposition of Polymers

  • Authors:
    Christopher M. Bates (UC/Santa Barbara), Rachel Segalman (UC/Santa Barbara), Craig Hawker (UC/Santa Barbara)
    Publication ID:
    P091138
    Publication Type:
    Annual Review
    Received Date:
    20-Jun-2017
    Last Edit Date:
    21-Jun-2017
    Research:
    2732.001 (University of California/Santa Barbara)

Abstract

This presentation details initial efforts in developing materials, processes, and characterization techniques that facilitate the selective deposition of polymers by spin coating. A polystyrene/poly(2-vinylpyridine) blend model system is used to interrogate substrate affinity with four surfaces of interest to SRC: copper, silicon dioxide, silicon nitride, and titanium nitride. Optimization of deposition conditions has produced vertical phase separation on each surface. Secondary ion mass spectrometry, attenuated total reflection infrared spectroscopy, and atomic force microscopic are consistent with P2VP substrate affinity and appear capable of interrogating film composition and/or selectivity. The efficacy of the experimental design and characterization methodologies described herein lay the groundwork to extend analysis of spin-on selectivity to other polymers and processing conditions.

Past Events

  Event Summary
27–28 June 2017
GRC
GRC
Nanomanufacturing Materials and Processes (NMP) Review
Tuesday, June 27, 2017, 8 a.m. — Wednesday, June 28, 2017, 5 p.m. PT
Stanford, CA, United States

4819 Emperor Blvd, Suite 300 Durham, NC 27703 Voice: (919) 941-9400 Fax: (919) 941-9450

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