Mechanistic Studies of Inorganic Resists

  • Authors:
    Gregory S. Herman (Oregon State Univ.)
    Publication ID:
    P091149
    Publication Type:
    Annual Review
    Received Date:
    21-Jun-2017
    Last Edit Date:
    22-Jun-2017
    Research:
    2438.001 (Oregon State University)

Abstract

The focus of the research is to characterize radiation induced mechanisms in inorganic photoresists. In this presentation we highlight recent ambient pressure X-ray photoelectron spectroscopy results.

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27–28 June 2017
GRC
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Nanomanufacturing Materials and Processes (NMP) Review
Tuesday, June 27, 2017, 8 a.m. — Wednesday, June 28, 2017, 5 p.m. PT
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