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Global Research Collaboration

Upcoming e-Workshops

Date Event Summary
14 May 2024
GRC
GRC		NMP e-Workshop: Gas Phase Methods for Selective Thermal Atomic Layer Etching of Si-Based Materials
Tuesday, May 14, 2024, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
11 July 2024
GRC
GRC		ESH e-Workshop: Experimental Evaluation of Degradation Rates and Transformation Products of Fluorinated Polymers used During Semiconductor Manufacturing
Thursday, July 11, 2024, 11 a.m.–noon ET
Durham, NC, United States
This will also include Targeted Sampling and Analysis to Support Source Tracking and Mass Balances of Organofluorine-Containing Compounds in Semiconductor Manufacturing Facilities
E-Workshop
19 September 2024
GRC
GRC		NMP e-Workshop: Quasi-2D Materials for Ultra-low Resistance Interconnects
Thursday, Sept. 19, 2024, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop

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