SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Farhang Shadman (University of Arizona), Director

This Center envisions a new generation of engineers educated in both semiconductor processing and ESH fundamentals,
and aims to integrate Design for the Environment into new industry processes and tools.


Research in the Environment, Safety, and Health (ESH) Thrust supports an overall mission of enabling sustainability and environmentally benign processing in integrated-circuit manufacturing. The SRC Center for Environmentally Benign Semiconductor Manufacturing (EBSM) provides overall coordination and leveraged university/government support for our ESH research program, as well as an opportunity for additional teaming with companies and government agencies involved in ESH activities. SRC-supported ESH research also serves an important role in educating and preparing students for careers in environmental engineering for the semiconductor industry.

Research Focus

The two major research focus areas in the ESH Thrust are: (1) development of new ESH characterization, screening, handling, and abatement methods for new materials and processes, and (2) exploration of ESH preferable manufacturing options using green chemistries and sustainable materials. Research activities within these two focus areas address the critical ESH research needs for the semiconductor industry and include the following topics: (a) nanomaterial occupational safety and health, (b) nanomaterial environmental discharges, (c) energetic materials characterization, handling, and safety, (d) ESH enablement of III-V materials and processes, and (e) chemical behavior characterization and predictive modeling for relevant semiconductor chemicals and materials.

EBSM Metrics

  1. Current

    5 Research Tasks
    5 Universities
    13 Students
    12 Faculty Researchers
    1 Liaison Personnel
  2. This Year

    5 Research Publications
  3. Last Year

    51 Research Publications
  4. Since Inception

    51 Research Tasks
    21 Universities
    379 Students
    89 Faculty Researchers
    127 Liaison Personnel
    1,260 Research Publications
    2 Patents Granted
Updated: 28-Mar-2017, 12:05 a.m. ET