Environment, Safety, and Health

Victor Zhirnov, Director & Chief Scientist

Exploration of greener material and process pathways is critically important in enabling environmentally friendly and sustainable manufacturing solutions for future semiconductor devices.


Research in the Environment, Safety, and Health (ESH) Subthrust supports an overall mission of enabling sustainability and environmentally benign processing in integrated-circuit manufacturing. The SRC Center for Environmentally Benign Semiconductor Manufacturing (EBSM) provides overall coordination and leveraged university/government support for our ESH research program, as well as an opportunity for additional teaming with companies and government agencies involved in ESH activities. SRC-supported ESH research also serves an important role in educating and preparing students for careers in environmental engineering for the semiconductor industry.

Research Focus

The two major research focus areas in the ESH Subthrust are: (1) development of new ESH characterization, screening, handling, and abatement methods for new materials and processes, and (2) exploration of ESH preferable manufacturing options using green chemistries and sustainable materials. Research activities within these two focus areas address the critical ESH research needs for the semiconductor industry and include the following topics: (a) nanomaterial occupational safety and health, (b) nanomaterial environmental discharges, (c) energetic materials characterization, handling, and safety, (d) ESH enablement of III-V materials and processes, and (e) chemical behavior characterization and predictive modeling for relevant semiconductor chemicals and materials.

ESH Metrics

  1. Current

    7 Research Tasks
    5 Universities
    7 Students
    8 Faculty Researchers
    35 Liaison Personnel
  2. This Year

    4 Task Starts
  3. Last Year

    3 Task Starts
    19 Research Publications
  4. Since Inception

    22 Research Tasks
    12 Universities
    57 Students
    35 Faculty Researchers
    43 Liaison Personnel
    223 Research Publications
Updated: 19-Mar-2019, 12:05 a.m. ET

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