Environment, Safety, and Health

Kashyap Yellai, Program Manager

Exploration of greener material and process pathways is critically important in enabling environmentally friendly and sustainable manufacturing solutions for future semiconductor devices consists of three main stages – wafer manufacturing, fabrication, and packaging/testing.


As part of SRC's Commitment to Sustainability, research in the Environment, Safety, and Health (ESH) program supports an overall mission of enabling sustainability and environmentally benign processing in integrated-circuit manufacturing. SRC-supported ESH research also serves an important role in educating and preparing students for careers in environmental engineering for the semiconductor industry.

Research Focus

The two major research focus areas in the ESH Subprogram are: (1) development of new ESH characterization, screening, handling, and abatement methods for new materials and processes, and (2) exploration of ESH preferable manufacturing options using green chemistries and sustainable materials. Research activities within these two focus areas address the critical ESH research needs for the semiconductor industry and include the following topics:

(a)   ESH impact analysis of materials including toxicity, environmental fate, and behavior characteristics

(b)   Aqueous effluent management for effective wastewater treatment to reduce hazardous waste generation

(c)   Air emissions management including measurement and removal techniques

(d)   Alternative materials analysis for more benign or easily treatable processes

Metric data displayed below is accurate through December 13, 2022. We appreciate your patience as we look to upgrade our reporting system and continue to provide ways for you to measure the success of your investments.

ESH Metrics

  1. Last Year

    6 Task Starts
    64 Research Publications
  2. Since Inception

    33 Research Tasks
    15 Universities
    78 Students
    49 Faculty Researchers
    86 Liaison Personnel
    411 Research Publications
Updated: 4-Oct-2023, 12:05 a.m. ET

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