Research in the Environment, Safety, and Health (ESH) Subthrust supports an overall mission of enabling sustainability and environmentally benign processing in integrated-circuit manufacturing. The SRC Center for Environmentally Benign Semiconductor Manufacturing (EBSM) provides overall coordination and leveraged university/government support for our ESH research program, as well as an opportunity for additional teaming with companies and government agencies involved in ESH activities. SRC-supported ESH research also serves an important role in educating and preparing students for careers in environmental engineering for the semiconductor industry.
The two major research focus areas in the ESH Subthrust are: (1) development of new ESH characterization, screening, handling, and abatement methods for new materials and processes, and (2) exploration of ESH preferable manufacturing options using green chemistries and sustainable materials. Research activities within these two focus areas address the critical ESH research needs for the semiconductor industry and include the following topics: (a) nanomaterial occupational safety and health, (b) nanomaterial environmental discharges, (c) energetic materials characterization, handling, and safety, (d) ESH enablement of III-V materials and processes, and (e) chemical behavior characterization and predictive modeling for relevant semiconductor chemicals and materials.
Current7 Research Tasks5 Universities7 Students8 Faculty Researchers35 Liaison Personnel
This Year4 Task Starts
Last Year3 Task Starts19 Research Publications
Since Inception22 Research Tasks12 Universities57 Students35 Faculty Researchers43 Liaison Personnel223 Research Publications