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GRC

NMP Nanomanufacturing Materials and Processes: Kwok Ng, Director
Marie Tripp, Co-Director

The need for integrating new materials and processes in each new generation of semiconductor manufacturing technology has become more the norm than the exception in striving to achieve gains in density, performance, and functionality.

Home » Program » GRC » NMP » Events

Past Events

Date	Event Summary
18 October 2018 GRC GRC	Orthogonal Dielectric/Metal Selective Area Atomic Layer Deposition (Option 1 of 2) Thursday, Oct. 18, 2018, 1 p.m.–2 p.m. ET Durham, NC, United States E-Workshop
18 October 2018 GRC GRC	Orthogonal Dielectric/Metal Selective Area Atomic Layer Deposition (Option 2 of 2) Thursday, Oct. 18, 2018, 8 p.m.–9 p.m. ET Durham, NC, United States E-Workshop
3 October 2018 GRC GRC	NMP e-Review Wednesday, Oct. 3, 2018, 11 a.m.–6 p.m. ET Durham, NC, United States
20 September 2018 GRC GRC	2D Cu Diffusion Barriers for Ultra-Scaled Interconnect Technologies (Option 1 of 2) Thursday, Sept. 20, 2018, 1 p.m.–2 p.m. ET Durham, NC, United States E-Workshop
20 September 2018 GRC GRC	2D Cu Diffusion Barriers for Ultra-Scaled Interconnect Technologies (Option 2 of 2) Thursday, Sept. 20, 2018, 8 p.m.–9 p.m. ET Durham, NC, United States E-Workshop
22 August 2018 GRC GRC	Achieving Selective Material Removal in Plasma-Based Atomic Layer Etching (ALE) of SiO2 (Option 1 of 2) Wednesday, Aug. 22, 2018, 1 p.m.–2 p.m. ET Durham, NC, United States E-Workshop
22 August 2018 GRC GRC	Achieving Selective Material Removal in Plasma-Based Atomic Layer Etching (ALE) of SiO2 (Option 2 of 2) Wednesday, Aug. 22, 2018, 8 p.m.–9 p.m. ET Durham, NC, United States E-Workshop
26 July 2018 GRC GRC	Update on Determining the Sensitivity of Metrology to Changes in Multi-Nanowire and Multi-Nanosheet FETs (Option 1 of 2) Thursday, July 26, 2018, 1 p.m.–2 p.m. ET Durham, NC, United States E-Workshop
26 July 2018 GRC GRC	Update on Determining the Sensitivity of Metrology to Changes in Multi-Nanowire and Multi-Nanosheet FETs (Option 2 of 2) Thursday, July 26, 2018, 8 p.m.–9 p.m. ET Durham, NC, United States E-Workshop
21 June 2018 GRC GRC	Thermal Atomic Layer Etching of Metal Gates (Option 1 of 2) Thursday, June 21, 2018, 1 p.m.–2 p.m. ET Durham, NC, United States E-Workshop
21 June 2018 GRC GRC	Thermal Atomic Layer Etching of Metal Gates (Option 2 of 2) Thursday, June 21, 2018, 8 p.m.–9 p.m. ET Durham, NC, United States E-Workshop
2–3 May 2018 GRC GRC	NMP Annual Review Wednesday, May 2, 2018, 8:30 a.m. — Thursday, May 3, 2018, 11 a.m. ET Raleigh, NC, United States
28 November 2017 GRC GRC	Dielectric Failure Mechanisms in Integrated Circuits Tuesday, Nov. 28, 2017, 8 p.m.–9 p.m. ET Research Triangle Park, NC, United States E-Workshop
27 November 2017 GRC GRC	Selective Spin-on Deposition of Polymers: An Update Monday, Nov. 27, 2017, 8 p.m.–9 p.m. ET Research Triangle Park, NC, United States E-Workshop

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