NMP
Nanomanufacturing Materials and Processes

Kashyap Yellai, Program Manager

The need for integrating new materials and processes in each new generation of semiconductor manufacturing technology has become more the norm than the exception in striving to achieve gains in density, performance, and functionality.

Upcoming Events

Date Event Summary
3–5 August 2022
GRC
GRC
Nanomanufacturing Materials and Processes Annual Review
Wednesday, Aug. 3, 2022, 8 a.m. — Friday, Aug. 5, 2022, 4 p.m. CT
Austin, TX, United States

15 September 2022
GRC
GRC
Novel Organic-Inorganic Hybrid EUV Dry Resists Deposited by Molecular Atomic Layer Deposition (MALD) (Option 1 of 2)
Thursday, Sept. 15, 2022, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
15 September 2022
GRC
GRC
Novel Organic-Inorganic Hybrid EUV Dry Resists Deposited by Molecular Atomic Layer Deposition (MALD) (Option 2 of 2)
Thursday, Sept. 15, 2022, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop

Past Events

Date Event Summary
19 May 2022
GRC
GRC
Low Temperature Thermodynamically‐Favored Area Selective Deposition (Option 1 of 2)
Thursday, May 19, 2022, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
19 May 2022
GRC
GRC
Low Temperature Thermodynamically‐Favored Area Selective Deposition (Option 2 of 2)
Thursday, May 19, 2022, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
17 May 2022
GRC
GRC
NMP e-Kickoff Meeting (May)
Tuesday, May 17, 2022, 7 p.m.–8 p.m. ET
Durham, NC, United States

15–16 March 2022
GRC
GRC
NMP e-Kickoff Meeting
Tuesday, March 15, 2022, 8 p.m. — Wednesday, March 16, 2022, 10 p.m. ET
Durham, NC, United States

15 December 2021
GRC
GRC
Metals for Narrow High-conductivity Interconnects (Option1 of 2)
Wednesday, Dec. 15, 2021, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
15 December 2021
GRC
GRC
Metals for Narrow High-conductivity Interconnects (Option 2 of 2)
Wednesday, Dec. 15, 2021, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
11 November 2021
GRC
GRC
Area-selective Deposition: An Assessment of Current Approaches and Challenges (Option 1 of 2)
Thursday, Nov. 11, 2021, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
11 November 2021
GRC
GRC
Area-selective Deposition: An Assessment of Current Approaches and Challenges (Option 2 of 2)
Thursday, Nov. 11, 2021, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
28–6 September 2021–October 2021
GRC
GRC
NMP Review
Tuesday, Sept. 28, 2021, 7 p.m. — Wednesday, Oct. 6, 2021, 10 p.m. ET
Durham, NC, United States

5 August 2021
GRC
GRC
Hierarchical Multi-agent Reinforcement Learning for Real-time Factory Scheduling (Option 1 of 2)
Thursday, Aug. 5, 2021, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
5 August 2021
GRC
GRC
Hierarchical Multi-agent Reinforcement Learning for Real-time Factory Scheduling (Option 2 of 2)
Thursday, Aug. 5, 2021, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
15 July 2021
GRC
GRC
Area‐Selective Oxidative‐Molecular Layer Deposition of Polymers (Option 1 of 2)
Thursday, July 15, 2021, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
15 July 2021
GRC
GRC
Area‐Selective Oxidative‐Molecular Layer Deposition of Polymers (Option 2 of 2)
Thursday, July 15, 2021, 8 p.m.–9 p.m. ET
Durham, NC, United States
Professor Greg Parsons from NC State, will speak on his research task 2873.001 in the NMP thrust.
E-Workshop
10 June 2021
GRC
GRC
Electromigration and the Electron Wind Force in Aluminum, Cobalt, and GST (Option 1 of 2)
Thursday, June 10, 2021, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
10 June 2021
GRC
GRC
Electromigration and the Electron Wind Force in Aluminum, Cobalt, and GST (Option 2 of 2)
Thursday, June 10, 2021, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
27 May 2021
GRC
GRC
Thermal Interface Engineering and Characterization of Nanostructures (Option 1 of 2)
Thursday, May 27, 2021, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
27 May 2021
GRC
GRC
Thermal Interface Engineering and Characterization of Nanostructures (Option 2 of 2)
Thursday, May 27, 2021, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop

4819 Emperor Blvd, Suite 300 Durham, NC 27703 Voice: (919) 941-9400 Fax: (919) 941-9450

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