NMP NMP
Nanomanufacturing Materials and Processes

Kwok Ng, Director
Marie Tripp, Co-Director

The need for integrating new materials and processes in each new generation of semiconductor manufacturing technology has become more the norm than the exception in striving to achieve gains in density, performance, and functionality.

Past Events

Date Event Summary
18 October 2018
GRC
GRC
Orthogonal Dielectric/Metal Selective Area Atomic Layer Deposition (Option 1 of 2)
Thursday, Oct. 18, 2018, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
18 October 2018
GRC
GRC
Orthogonal Dielectric/Metal Selective Area Atomic Layer Deposition (Option 2 of 2)
Thursday, Oct. 18, 2018, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
3 October 2018
GRC
GRC
NMP e-Review
Wednesday, Oct. 3, 2018, 11 a.m.–6 p.m. ET
Durham, NC, United States

20 September 2018
GRC
GRC
2D Cu Diffusion Barriers for Ultra-Scaled Interconnect Technologies (Option 1 of 2)
Thursday, Sept. 20, 2018, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
20 September 2018
GRC
GRC
2D Cu Diffusion Barriers for Ultra-Scaled Interconnect Technologies (Option 2 of 2)
Thursday, Sept. 20, 2018, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
22 August 2018
GRC
GRC
Achieving Selective Material Removal in Plasma-Based Atomic Layer Etching (ALE) of SiO2 (Option 1 of 2)
Wednesday, Aug. 22, 2018, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
22 August 2018
GRC
GRC
Achieving Selective Material Removal in Plasma-Based Atomic Layer Etching (ALE) of SiO2 (Option 2 of 2)
Wednesday, Aug. 22, 2018, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
26 July 2018
GRC
GRC
Update on Determining the Sensitivity of Metrology to Changes in Multi-Nanowire and Multi-Nanosheet FETs (Option 1 of 2)
Thursday, July 26, 2018, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
26 July 2018
GRC
GRC
Update on Determining the Sensitivity of Metrology to Changes in Multi-Nanowire and Multi-Nanosheet FETs (Option 2 of 2)
Thursday, July 26, 2018, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
21 June 2018
GRC
GRC
Thermal Atomic Layer Etching of Metal Gates (Option 1 of 2)
Thursday, June 21, 2018, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
21 June 2018
GRC
GRC
Thermal Atomic Layer Etching of Metal Gates (Option 2 of 2)
Thursday, June 21, 2018, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
2–3 May 2018
GRC
GRC
NMP Annual Review
Wednesday, May 2, 2018, 8:30 a.m. — Thursday, May 3, 2018, 11 a.m. ET
Raleigh, NC, United States

28 November 2017
GRC
GRC
Dielectric Failure Mechanisms in Integrated Circuits
Tuesday, Nov. 28, 2017, 8 p.m.–9 p.m. ET
Research Triangle Park, NC, United States

E-Workshop
27 November 2017
GRC
GRC
Selective Spin-on Deposition of Polymers: An Update
Monday, Nov. 27, 2017, 8 p.m.–9 p.m. ET
Research Triangle Park, NC, United States

E-Workshop

4819 Emperor Blvd, Suite 300 Durham, NC 27703 Voice: (919) 941-9400 Fax: (919) 941-9450

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