NMP
Nanomanufacturing Materials and Processes

Kashyap Yellai, Program Manager

The need for integrating new materials and processes in each new generation of semiconductor manufacturing technology has become more the norm than the exception in striving to achieve gains in density, performance, and functionality.

Upcoming Events

Date Event Summary
20 April 2023
GRC
GRC
High-conductivity Vertical Interconnects with Low Contact Resistance
Thursday, April 20, 2023, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
17 August 2023
GRC
GRC
Area Selective Deposition on Ultrathin EUV Resists- Towards Enabling High NA EUV Resists
Thursday, Aug. 17, 2023, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
3–6 October 2023
GRC
GRC
LMD / NMP Combined 2023 Annual Review
Tuesday, Oct. 3, 2023, 8 a.m. — Friday, Oct. 6, 2023, 7 p.m. ET
Albany, NY, United States

Past Events

Date Event Summary
15 September 2022
GRC
GRC
Novel Organic-Inorganic Hybrid EUV Dry Resists Deposited by Molecular Atomic Layer Deposition (MALD) (Option 1 of 2)
Thursday, Sept. 15, 2022, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
15 September 2022
GRC
GRC
Novel Organic-Inorganic Hybrid EUV Dry Resists Deposited by Molecular Atomic Layer Deposition (MALD) (Option 2 of 2)
Thursday, Sept. 15, 2022, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
3–5 August 2022
GRC
GRC
Nanomanufacturing Materials and Processes Annual Review (Austin, TX)
Wednesday, Aug. 3, 2022, 8 a.m. — Friday, Aug. 5, 2022, 4 p.m. CT
Austin, TX, United States

19 May 2022
GRC
GRC
Low Temperature Thermodynamically‐Favored Area Selective Deposition (Option 1 of 2)
Thursday, May 19, 2022, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
19 May 2022
GRC
GRC
Low Temperature Thermodynamically‐Favored Area Selective Deposition (Option 2 of 2)
Thursday, May 19, 2022, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
17 May 2022
GRC
GRC
NMP e-Kickoff Meeting (May)
Tuesday, May 17, 2022, 7 p.m.–8 p.m. ET
Durham, NC, United States

4819 Emperor Blvd, Suite 300 Durham, NC 27703 Voice: (919) 941-9400 Fax: (919) 941-9450

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