NMP
Nanomanufacturing Materials and Processes

Victor Zhirnov, Director & Chief Scientist
Marie Tripp, Co-Director
Daniel Rasic, Research Scientist

The need for integrating new materials and processes in each new generation of semiconductor manufacturing technology has become more the norm than the exception in striving to achieve gains in density, performance, and functionality.

Upcoming Events

Date Event Summary
27 February 2020
GRC
GRC
New Precursors and Processes for the Atomic Layer Deposition of Metal and Metal Nitride Films (Option 1 of 2)
Thursday, Feb. 27, 2020, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
27 February 2020
GRC
GRC
New Precursors and Processes for the Atomic Layer Deposition of Metal and Metal Nitride Films (Option 2 of 2)
Thursday, Feb. 27, 2020, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
3 March 2020
GRC
GRC
NMP TAB Meeting
Tuesday, March 3, 2020, 7 p.m.–8 p.m. ET
Durham, NC, United States

26 March 2020
GRC
GRC
Fabrication and Testing of Quasi-1D van der Waals Metal Interconnects (Option 1 of 2)
Thursday, March 26, 2020, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
26 March 2020
GRC
GRC
Fabrication and Testing of Quasi-1D van der Waals Metal Interconnects (Option 2 of 2)
Thursday, March 26, 2020, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
30 April 2020
GRC
GRC
Crystalline Electronic and Photonic Materials without an Epitaxial Template (Option 1 of 2)
Thursday, April 30, 2020, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
30 April 2020
GRC
GRC
Crystalline Electronic and Photonic Materials without an Epitaxial Template (Option 2 of 2)
Thursday, April 30, 2020, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
21 May 2020
GRC
GRC
Sub-5 nm Patterning via Template-directed Assembly of Colloidal Nanocrystals (NCs) (Option 2 of 2)
Thursday, May 21, 2020, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
21 May 2020
GRC
GRC
Sub-5 nm Patterning via Template-directed Assembly of Colloidal Nanocrystals (NCs) (Option 1 of 2)
Thursday, May 21, 2020, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
25 June 2020
GRC
GRC
Deposition-Based Control of Ferroelectric Hafnia for Phase Purity and Enhanced Performance (Option 1 of 2)
Thursday, June 25, 2020, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
25 June 2020
GRC
GRC
Deposition-Based Control of Ferroelectric Hafnia for Phase Purity and Enhanced Performance (Option 2 of 2)
Thursday, June 25, 2020, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
30 July 2020
GRC
GRC
Determining the Sensitivity of Metrology to Changes in Multi-Nanowire and Multi-Nanosheet FETs (Option 2 of 2)
Thursday, July 30, 2020, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
30 July 2020
GRC
GRC
Determining the Sensitivity of Metrology to Changes in Multi-Nanowire and Multi-Nanosheet FETs (Option 1 of 2)
Thursday, July 30, 2020, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
16–17 September 2020
GRC
GRC
Nanomanufacturing Materials & Processes (NMP) Annual Review
Wednesday, Sept. 16, 2020, 8 a.m. — Thursday, Sept. 17, 2020, 5 p.m. CT
Austin, TX, United States

19 November 2020
GRC
GRC
Area-Selective Deposition of Organic Films Using Molecular Layer Deposition and Molecular Layer Etching (Option 1 of 2)
Thursday, Nov. 19, 2020, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
19 November 2020
GRC
GRC
Area-Selective Deposition of Organic Films Using Molecular Layer Deposition and Molecular Layer Etching (Option 2 of 2)
Thursday, Nov. 19, 2020, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop

Past Events

Date Event Summary
16 January 2020
GRC
GRC
EUV Resist Stochastics Beyond 3 Sigma (Option 1 of 2)
Thursday, Jan. 16, 2020, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
16 January 2020
GRC
GRC
EUV Resist Stochastics Beyond 3 Sigma (Option 2 of 2)
Thursday, Jan. 16, 2020, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
18 December 2019
GRC
GRC
Selective Deposition with Directed Self-assembly
Wednesday, Dec. 18, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
4 December 2019
GRC
GRC
Integrated ALD/ALE for Area‐Selective Deposition: Systems‐Level Challenges in Atomic Scale Processing (Option 1 of 2)
Wednesday, Dec. 4, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
4 December 2019
GRC
GRC
Integrated ALD/ALE for Area‐Selective Deposition: Systems‐Level Challenges in Atomic Scale Processing (Option 2 of 2)
Wednesday, Dec. 4, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
13 November 2019
GRC
GRC
Achieving Selective Material Removal in Plasma-Based Atomic Layer Etching (ALE) (Option 1 of 2)
Wednesday, Nov. 13, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
13 November 2019
GRC
GRC
Achieving Selective Material Removal in Plasma-Based Atomic Layer Etching (ALE) (Option 2 of 2)
Wednesday, Nov. 13, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
11–12 September 2019
GRC
GRC
NMP Annual Review
Wednesday, Sept. 11, 2019, 8 a.m. — Thursday, Sept. 12, 2019, 5 p.m. CT
Austin, TX, United States

24 July 2019
GRC
GRC
Update on Determining the Sensitivity of Metrology to Changes in Multi-Nanowire and Multi-Nanosheet FETs (Option 1 of 2)
Wednesday, July 24, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
24 July 2019
GRC
GRC
Update on Determining the Sensitivity of Metrology to Changes in Multi-Nanowire and Multi-Nanosheet FETs (Option 2 of 2)
Wednesday, July 24, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
10 July 2019
GRC
GRC
NMP - Effective Patterning of Ni for EUV Masks (Option 1 of 2)
Wednesday, July 10, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
1 May 2019
GRC
GRC
Sub-5 nm Patterning via Self-Assembly and Template-Assisted Assembly of Colloidal Nanocrystals (Option 1 of 2)
Wednesday, May 1, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
24 April 2019
GRC
GRC
Rapid and Selective Deposition of Patterned Thin Films via Spin Coating (Option 1 of 2)
Wednesday, April 24, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
24 April 2019
GRC
GRC
Rapid and Selective Deposition of Patterned Thin Films via Spin Coating (Option 2 of 2)
Wednesday, April 24, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
17 April 2019
GRC
GRC
CMOS + III-V’s – Materials Approaches for Functional Diversification of CMOS Platforms (Option 1 of 2)
Wednesday, April 17, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
17 April 2019
GRC
GRC
CMOS + III-V’s – Materials Approaches for Functional Diversification of CMOS Platforms (Option 2 of 2)
Wednesday, April 17, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
20 March 2019
GRC
GRC
Quasi 2D and 1D van der Waals Materials: Properties and Device Applications (Option 1 of 2)
Wednesday, March 20, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
20 March 2019
GRC
GRC
Quasi 2D and 1D van der Waals Materials: Properties and Device Applications (Option 2 of 2)
Wednesday, March 20, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
27 February 2019
GRC
GRC
New Precursors and Processes for the Atomic Layer Deposition of Metal and Metal Nitride Films (Option 1 of 2)
Wednesday, Feb. 27, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
27 February 2019
GRC
GRC
New Precursors and Processes for the Atomic Layer Deposition of Metal and Metal Nitride Films (Option 2 of 2)
Wednesday, Feb. 27, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop

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