NMP
Nanomanufacturing Materials and Processes

Victor Zhirnov, Director & Chief Scientist
Marie Tripp, Co-Director

The need for integrating new materials and processes in each new generation of semiconductor manufacturing technology has become more the norm than the exception in striving to achieve gains in density, performance, and functionality.

Upcoming Events

Date Event Summary
17 April 2019
GRC
GRC
Crystalline Electronic and Photonic Materials without an Epitaxial Template (Option 1 of 2)
Wednesday, April 17, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
17 April 2019
GRC
GRC
NEW — Crystalline Electronic and Photonic Materials without an Epitaxial Template (Option 2 of 2)
Wednesday, April 17, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
24 April 2019
GRC
GRC
Rapid and Selective Deposition of Patterned Thin Films via Spin Coating (Option 1 of 2)
Wednesday, April 24, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
24 April 2019
GRC
GRC
NEW — Rapid and Selective Deposition of Patterned Thin Films via Spin Coating (Option 2 of 2)
Wednesday, April 24, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
1 May 2019
GRC
GRC
Sub-5 nm Patterning via Template-directed Assembly of Colloidal Nanocrystals (NCs) (Option 1 of 2)
Wednesday, May 1, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
1 May 2019
GRC
GRC
NEW — Sub-5 nm Patterning via Template-directed Assembly of Colloidal Nanocrystals (NCs) (Option 2 of 2)
Wednesday, May 1, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
10 July 2019
GRC
GRC
Effective Patterning of Ni for EUV Masks (Option 1 of 2)
Wednesday, July 10, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
10 July 2019
GRC
GRC
NEW — Effective Patterning of Ni for EUV Masks (Option 2 of 2)
Wednesday, July 10, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
24 July 2019
GRC
GRC
Determining the Sensitivity of Metrology to Changes in Multi-Nanowire and Multi-Nanosheet FETs (Option 1 of 2)
Wednesday, July 24, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
24 July 2019
GRC
GRC
NEW — Determining the Sensitivity of Metrology to Changes in Multi-Nanowire and Multi-Nanosheet FETs (Option 2 of 2)
Wednesday, July 24, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
11–12 September 2019
GRC
GRC
NMP Annual Review
Wednesday, Sept. 11, 2019, 8 a.m. — Thursday, Sept. 12, 2019, 5 p.m. CT
Austin, TX, United States

20 November 2019
GRC
GRC
Decoupled Process Sequences/Surface Chemistries Enabling Atomic Layer Etching of Critical Materials (Option 1 of 2)
Wednesday, Nov. 20, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
20 November 2019
GRC
GRC
NEW — Decoupled Process Sequences/Surface Chemistries Enabling Atomic Layer Etching of Critical Materials (Option 2 of 2)
Wednesday, Nov. 20, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
4 December 2019
GRC
GRC
Effective Patterning of Ni for EUV Masks (Option 1 of 2)
Wednesday, Dec. 4, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
4 December 2019
GRC
GRC
NEW — Effective Patterning of Ni for EUV Masks (Option 2 of 2)
Wednesday, Dec. 4, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
18 December 2019
GRC
GRC
Selective Deposition with Directed Self-assembly (Option 1 of 2)
Wednesday, Dec. 18, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
18 December 2019
GRC
GRC
NEW — Selective Deposition with Directed Self-assembly (Option 2 of 2)
Wednesday, Dec. 18, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop

Past Events

Date Event Summary
20 March 2019
GRC
GRC
Quasi 2D and 1D van der Waals Materials: Properties and Device Applications (Option 1 of 2)
Wednesday, March 20, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
20 March 2019
GRC
GRC
Quasi 2D and 1D van der Waals Materials: Properties and Device Applications (Option 2 of 2)
Wednesday, March 20, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
27 February 2019
GRC
GRC
New Precursors and Processes for the Atomic Layer Deposition of Metal and Metal Nitride Films (Option 1 of 2)
Wednesday, Feb. 27, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
27 February 2019
GRC
GRC
New Precursors and Processes for the Atomic Layer Deposition of Metal and Metal Nitride Films (Option 2 of 2)
Wednesday, Feb. 27, 2019, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
20 February 2019
GRC
GRC
Area-selective ALD of Nitrides using Inhibitors and Plasma Processes in ABC-type Cycles
Wednesday, Feb. 20, 2019, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
18 October 2018
GRC
GRC
Orthogonal Dielectric/Metal Selective Area Atomic Layer Deposition (Option 1 of 2)
Thursday, Oct. 18, 2018, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
18 October 2018
GRC
GRC
Orthogonal Dielectric/Metal Selective Area Atomic Layer Deposition (Option 2 of 2)
Thursday, Oct. 18, 2018, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
3 October 2018
GRC
GRC
NMP e-Review
Wednesday, Oct. 3, 2018, 11 a.m.–6 p.m. ET
Durham, NC, United States

20 September 2018
GRC
GRC
2D Cu Diffusion Barriers for Ultra-Scaled Interconnect Technologies (Option 1 of 2)
Thursday, Sept. 20, 2018, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
20 September 2018
GRC
GRC
2D Cu Diffusion Barriers for Ultra-Scaled Interconnect Technologies (Option 2 of 2)
Thursday, Sept. 20, 2018, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
22 August 2018
GRC
GRC
Achieving Selective Material Removal in Plasma-Based Atomic Layer Etching (ALE) of SiO2 (Option 1 of 2)
Wednesday, Aug. 22, 2018, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
22 August 2018
GRC
GRC
Achieving Selective Material Removal in Plasma-Based Atomic Layer Etching (ALE) of SiO2 (Option 2 of 2)
Wednesday, Aug. 22, 2018, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
26 July 2018
GRC
GRC
Update on Determining the Sensitivity of Metrology to Changes in Multi-Nanowire and Multi-Nanosheet FETs (Option 1 of 2)
Thursday, July 26, 2018, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
26 July 2018
GRC
GRC
Update on Determining the Sensitivity of Metrology to Changes in Multi-Nanowire and Multi-Nanosheet FETs (Option 2 of 2)
Thursday, July 26, 2018, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
21 June 2018
GRC
GRC
Thermal Atomic Layer Etching of Metal Gates (Option 1 of 2)
Thursday, June 21, 2018, 1 p.m.–2 p.m. ET
Durham, NC, United States

E-Workshop
21 June 2018
GRC
GRC
Thermal Atomic Layer Etching of Metal Gates (Option 2 of 2)
Thursday, June 21, 2018, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop
2–3 May 2018
GRC
GRC
NMP Annual Review
Wednesday, May 2, 2018, 8:30 a.m. — Thursday, May 3, 2018, 11 a.m. ET
Raleigh, NC, United States

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