The theme vision is to establish large-scale synthesis of 2D transition metal dichalcogenides (TMD) compatible with back-end-of-the-line (BEOL) technologies for novel device applications, and low temperature epitaxial growth of traditional semiconductors and novel materials using selective deposition and processing. The goals include: 1) Demonstrate scalable metal-organic chemical vapor deposition of NbS2 and MoTe2 for utilization in memory and interconnect device architectures; 2) Investigate TMD phase formation as a function of synthetic chemistries and understand the impact on the fundamental structural, chemical and optical properties; 3) Investigate selective growth of phase engineered TMDs through functionalization of substrates and nano-textured surfaces. The proposed goals build off of our groups successful development of large area scalable synthesis, characterization, and integration of two-dimensional materials; 4) Develop methods for selective processing of functional materials for next generation devices; and 5) BEOL material integration processes focusing on low temperature growth of traditional semiconductors and novel materials including topological insulators.
Current5 Research Tasks4 Universities8 Students7 Faculty Researchers12 Liaison Personnel
This Year5 Task Starts10 Research Publications