Questions?
[x] GRC Science Area
MIC – Microstructure Sciences

Content Type
Patent Filings 2

SRC Program
GRC 2

Thrust/Theme
Lithography 2

1 through 2 of 2 similar documents, best matches first.   
1: Method of Making Microelectronic Structures Utilizing Photoresists...
Method of Making Microelectronic Structures Utilizing Photoresists Containing C3C12 Water Soluble Suguar Crosslinking Agents Application Type: Divisional Patent Number: 5532113 ...
URL: https://www.src.org/library/patent/p0021/
Modified: 1996-07-02 - 21KB
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2: Photoresists Containing Water Soluble Sugar Crosslinking Agents...
Photoresists Containing Water Soluble Sugar Crosslinking Agents Application Type: Utility Patent Number: 5536616 Country: United States Status: Filed on 21-Sep-1994, Issued on ...
URL: https://www.src.org/library/patent/p0018/
Modified: 1996-07-16 - 21KB
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