Questions?
[x] SRC Program
GRC

[x] GRC Science Area
NMS – Nanomanufacturing Sciences

Content Type
Events 4

Year
2016 1
2010 3

Center
EBSM 1

Thrust/Theme
ESH – Environment Safety and Hea... 1

1 through 4 of 4 similar documents, best matches first.   
1: pdfSlide 1
ITRS - Deterministic Doping, Thomas Schenkel, LBNL, Nov. 12, 2010 Single Ion Implantation Thomas Schenkel Lawrence Berkeley National Laboratory T_Schenkel@LBL.gov ITRS - ...
URL: https://www.src.org/calendar/e004100/e004100-00-session2.pdf
Modified: 2010-11-29 - 52.6MB
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2: pdfSlide 1
230 250 270 290 310 0 0 0 0 0 0 0 0 1 2 240 260 280 300 V G (mV) V G (mV) I (nA) V SD = - 30 mV The absence of steps the sequential nature coupling of the atom. Figure 4b shows ...
URL: https://www.src.org/calendar/e004100/e004100-00-session3.pdf
Modified: 2010-11-29 - 29.2MB
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3: The Challenges and Opportunities of Atomic Layer Etching (Event...
The Challenges and Opportunities of Atomic Layer Etching Date: Thursday, May 5, 2016, 2 p.m.-3 p.m. ET Location: University of Arizona, Tucson, AZ, United States Type: e-Workshop ...
URL: https://www.src.org/calendar/e005904/
Modified: 2016-11-05 - 34KB
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4: pdfスライド 1
1 2nd ITRS Deterministic Doping Workshop, Nov. 12, 2010, D. Herr & T. Shinada International Technology Roadmap for Semiconductors 2nd Deterministic Doping Workshop Emerging ...
URL: https://www.src.org/calendar/e004100/e004100-summary.pdf
Modified: 2010-11-29 - 816KB
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