Questions?
[x] GRC Science Area
MFGPS – Manufacturing Process Sciences

[x] Content Type
Patent Filings

SRC Program
GRC 2

Thrust/Theme
Deposition 1
Reliability 1

1 through 2 of 2 similar documents, best matches first.   
1: Systems, Methods and Computer Program Products for Prediction...
Systems, Methods and Computer Program Products for Prediction of Defect-Related Failures in Integrated Circuits Application Type: Utility Patent Number: 5822218 Country: United ...
URL: https://www.src.org/library/patent/p0050/
Modified: 1998-10-13 - 22KB
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2: Method for Forming a Layer of Uniform Thickness On a Semiconductor...
Method for Forming a Layer of Uniform Thickness On a Semiconductor Wafer During Rapid Thermal Processing Application Type: Utility Patent Number: 5439850 Country: United States ...
URL: https://www.src.org/library/patent/p0033/
Modified: 1995-08-08 - 21KB
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