Questions?
[x] GRC Science Area
MBP – Materials & Bulk Processes Sciences

Content Type
Patent Filings 2

SRC Program
GRC 2

Thrust/Theme
Deposition 1
Doping Technologies 1

1 through 2 of 2 similar documents, best matches first.   
1: Selective Deposition of Doped Silicon-Germanium Alloy on Semiconductor...
Selective Deposition of Doped Silicon-Germanium Alloy on Semiconductor Substrate, and Resulting Structures Application Type: Divisional Patent Number: 5336903 Country: United ...
URL: https://www.src.org/library/patent/p0063/
Modified: 1994-08-09 - 22KB
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2: Method for Forming a Layer of Uniform Thickness On a Semiconductor...
Method for Forming a Layer of Uniform Thickness On a Semiconductor Wafer During Rapid Thermal Processing Application Type: Utility Patent Number: 5439850 Country: United States ...
URL: https://www.src.org/library/patent/p0033/
Modified: 1995-08-08 - 21KB
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