Questions?
[x] Content Type
Patent Filings

[x] GRC Science Area
MFGPS – Manufacturing Process Sciences

SRC Program
GRC 3

Thrust/Theme
Deposition 1
Doping Technologies 1
Reliability 1

1 through 3 of 3 similar documents, best matches first.   
1: Systems, Methods and Computer Program Products for Prediction...
Systems, Methods and Computer Program Products for Prediction of Defect-Related Failures in Integrated Circuits Application Type: Utility Patent Number: 5822218 Country: United ...
URL: https://www.src.org/library/patent/p0050/
Modified: 1998-10-13 - 22KB
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2: Three-Zone Rapid Thermal Processing System Utilizing Wafer Edge...
Three-Zone Rapid Thermal Processing System Utilizing Wafer Edge Heating Means Application Type: Utility Patent Number: 5418885 Country: United States Status: Filed on 29-Dec-1992, ...
URL: https://www.src.org/library/patent/p0040/
Modified: 1995-05-23 - 22KB
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3: Method for Forming a Layer of Uniform Thickness On a Semiconductor...
Method for Forming a Layer of Uniform Thickness On a Semiconductor Wafer During Rapid Thermal Processing Application Type: Utility Patent Number: 5439850 Country: United States ...
URL: https://www.src.org/library/patent/p0033/
Modified: 1995-08-08 - 21KB
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