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- 1:
 Shinada
- Deterministic-doped Silicon Devices and Their Quantum Transport Future CMOS requires placement of dopants in predetermined locations; deterministic doping. The current ...
URL: https://www.src.org/calendar/e004645/shinada.pdf
Modified: 2012-02-16 - 23KB
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- 2:
Sugiyama - TEL Workshop
- Toray Research Center, Inc. Digital slice image Plug-2 100nm seam Barrier metal W-plug 7.2 nm 5.8 nm 3.9 nm 5.1 nm Thickness of TiN become thinner around the bottom of plug ...
URL: https://www.src.org/calendar/e004645/sugiyama.pdf
Modified: 2012-02-21 - 130KB
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