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Biography: Burn J. Lin

Burn J. Lin

Senior Director
TSMC

Burn J. Lin is a Vice President at TSMC, Ltd., since 2011. He joined TSMC in 2000 as a senior director. Prior to that, he founded Linnovation, Inc. in 1992. Earlier he held various technical and managerial positions at IBM after joining IBM in 1970. He has been extending the limit of optical lithography for close to four decades.

Dr. Lin is the editor in chief of the Journal of Micro/nanolithography, MEMS, and MOEMS, life member of the US National Academy of Engineering, IEEE Life Fellow and SPIE Fellow. He received the 1st Semi IC Outstanding Achievement Award in 2010, 2009 IEEE Cledo Brunetti Award, 2009 Benjamin G. Lamme Meritorious Achievement Medal, 2007 Industrial Technology Advancement Award, 2006 Distinguished Optical Engineering Award, 2005 Most Valuable Player in VLSI Research Inc.’s All-Stars of the Chip Making Industry, 2005 Ten best managers in Taiwan, 2004 Outstanding Research Award from PWY Foundation, 2004 1st recipient of SPIE Frits Zernike award, 2003 Outstanding Scientific and Technological Worker Award, 2002 Ten Best Engineers in Taiwan. Through out his career, he received 2 TSMC Innovation Awards, 10 IBM Invention Awards, and IBM Outstanding Technical Contribution Award.

Dr. Lin has written 1 book and 3 book chapters, published 121 articles mostly first-authored, and has 66 US patents.

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