Phase-Shifting Test Mask Patterns for Characterizing Illumination and Mask Quality in Image Forming Optical Systems
Inventors
- Andrew R. Neureuther (UC/Berkeley)
- Gregory R. McIntyre (UC/Berkeley)
Related Patents
Phase-shifting Test Mask Patterns for Characterizing Illumination and Mask Quality in Image Forming Optical Systems
Gregory R. McIntyre (UC/Berkeley); Andrew R. Neureuther (UC/Berkeley)Patent Application Expired
Application Type: Provisional