Phase-Shifting Test Mask Patterns for Characterizing Illumination and Mask Quality in Image Forming Optical Systems

    • Application Type:
      Utility
      Patent Number:
      7648802
      Country:
      United States
      Status:
      Filed on 7-Feb-2005, Issued on 19-Jan-2010, Patent Abandoned
      Organization:
      University of California, Berkeley
      SRC Filing ID:
      P0514

    Inventors

    • Andrew R. Neureuther (UC/Berkeley)
    • Gregory R. McIntyre (UC/Berkeley)

    Related Patents

    P0449
    Application Expired
    GRC

    Phase-shifting Test Mask Patterns for Characterizing Illumination and Mask Quality in Image Forming Optical Systems

    Gregory R. McIntyre (UC/Berkeley); Andrew R. Neureuther (UC/Berkeley)
    Patent Application Expired
    Application Type: Provisional

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