Low Temperature Metal Etching and Patterning

    • Application Type:
      Utility
      Patent Number:
      8679359
      Country:
      United States
      Status:
      Filed on 10-May-2011, Issued on 25-Mar-2014
      Organization:
      Georgia Institute of Technology
      SRC Filing ID:
      P1290

    Inventors

    • Dennis W. Hess (Georgia Tech)
    • Fangyu Wu (Georgia Tech)
    • Galit Levitin (Georgia Tech)

    Related Patents

    P1289
    Application Expired
    GRC

    Low Temperature Etching and Patterning of Copper by Hydrogen, Helium and Argon-Hydrogen Plasma

    Dennis W. Hess (Georgia Tech); Galit Levitin (Georgia Tech); Fangyu Wu (Georgia Tech)
    Patent Application Expired
    Application Type: Provisional

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