Questions?
[x] GRC Science Area
MIC – Microstructure Sciences

Content Type
Patent Filings 2

SRC Program
GRC 2

Thrust/Theme
Processes – Processes 2

1 through 2 of 2 similar documents, best matches first.   
1: Systems for Performing Chemical Mechanical Planarization and...
Systems for Performing Chemical Mechanical Planarization and Process for Conducting Same Application Type: Utility Patent Number: 5637185 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0012/
Modified: 1997-06-10 - 24KB
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2: Oxidation Resistant High Conductivity Copper Layers for Microelectric...
Oxidation Resistant High Conductivity Copper Layers for Microelectric Applications and Process of Making Same Application Type: Utility Patent Number: 5622608 Country: United ...
URL: https://www.src.org/library/patent/p0007/
Modified: 1997-04-22 - 22KB
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