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[x] GRC Science Area
LIT – Lithography Sciences

[x] Content Type
Patent Filings

SRC Program
GRC 1

Thrust/Theme
PAT – Patterning 1

1 through 1 of 1 similar documents, best matches first.   
1: CHARACTERIZING ABERRATIONS IN AN IMAGING LENS AND APPLICATIONS...
CHARACTERIZING ABERRATIONS IN AN IMAGING LENS AND APPLICATIONS TO VISUAL TESTING AND INTEGRATED CIRCUIT MASK ANALYSIS Application Type: Utility Patent Number: 7030997 Country: ...
URL: https://www.src.org/library/patent/p0302/
Modified: 2006-04-18 - 22KB
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