CHARACTERIZING ABERRATIONS IN AN IMAGING LENS AND APPLICATIONS TO VISUAL TESTING AND INTEGRATED CIRCUIT MASK ANALYSIS

• Application Type:

  Utility

  Patent Number:

  7030997

  Country:

  United States

  Status:

  Filed on 10-Sep-2002, Issued on 18-Apr-2006, Patent Abandoned

  Organization:

  University of California, Berkeley

  SRC Filing ID:

  P0302

Inventors

• Andrew R. Neureuther (UC/Berkeley)
• Konstantinos Adam (UC/Berkeley)
• Garth C. Robins (UC/Berkeley)
• Frank E. Gennari (UC/Berkeley)