[x]
SRC Program
| Content Type |
| Patent Filings | 1 |
| Center |
| ASCENT | 1 |
| Thrust/Theme |
| ASCENT-T1 – Vertical CMOS | 1 |
| 1 through 1 of 1 similar documents, best matches first. | ||
- 1: Low-Temperature Deposition of High-Quality Aluminum Nitride Films...
- Low-Temperature Deposition of High-Quality Aluminum Nitride Films for Heat Spreading Applications Application Type: Utility Country: United States Status: Filed on 8-Feb-2021, ...
URL: https://www.src.org/library/patent/p1895/
Modified: 2021-02-08 - 29KB
Find Similar Documents