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GRC Science Area
NMS – Nanomanufacturing Sciences
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- 1:
 Microsoft Word - Executive Summary [Koji INOUE][1].doc
- 1 Participants only: Not for distribution. 2nd Deterministic Doping Workshop November 12, 2010, UC Berkeley ) 50nm n-MOS p-MOS X Y Z Fig. 1. 3D elemental maps of full sections of ...
URL: https://www.src.org/...004100-07-executive-summary-inoue.pdf
Modified: 2010-11-09 - 1.3MB
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- 2:
Slide 1
- ITRS - Deterministic Doping, Thomas Schenkel, LBNL, Nov. 12, 2010 Single Ion Implantation Thomas Schenkel Lawrence Berkeley National Laboratory T_Schenkel@LBL.gov ITRS - ...
URL: https://www.src.org/calendar/e004100/e004100-00-session2.pdf
Modified: 2010-11-29 - 52.6MB
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- 3:
スライド 1
- 1 2nd ITRS Deterministic Doping Workshop, Nov. 12, 2010, D. Herr & T. Shinada International Technology Roadmap for Semiconductors 2nd Deterministic Doping Workshop Emerging ...
URL: https://www.src.org/calendar/e004100/e004100-summary.pdf
Modified: 2010-11-29 - 816KB
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- 4:
Slide 1
- 230 250 270 290 310 0 0 0 0 0 0 0 0 1 2 240 260 280 300 V G (mV) V G (mV) I (nA) V SD = - 30 mV The absence of steps the sequential nature coupling of the atom. Figure 4b shows ...
URL: https://www.src.org/calendar/e004100/e004100-00-session3.pdf
Modified: 2010-11-29 - 29.2MB
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- 5:
スライド 1
- 1 2nd ITRS Deterministic Doping Workshop, Nov. 12, 2010, D. Herr & T. Shinada 2nd Deterministic Doping Workshop Emerging Research Materials (ERM) International Technology Roadmap ...
URL: https://www.src.org/...04100/e004100-00-presentationherr.pdf
Modified: 2010-12-01 - 1.8MB
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- 6:
Microsoft Word - ITRSpaperfinal.doc
- Transport metrology for ultra-scaled MOSFETs G.C. Tettamanzi 1,* , G.P. Lansbergen 1 , J. Verduijn 1 , R. Rahman 2 , A. Paul 2 , S. Lee 2 N. Collaert 3 , S. Biesemans 3 , G. ...
URL: https://www.src.org/...004100-09-executive-summary-rogge.pdf
Modified: 2010-11-09 - 356KB
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- 7:
Microsoft Word - Executive Summary [M. Tabe]
- Participants o Title: Single Name(s): Mi Affiliation(s) Introduction Recently, problems for single-dopan (Shizuoka U dopants as a In this bac technology t devices [10-1 work as ...
URL: https://www.src.org/...e004100-10-executive-summary-tabe.pdf
Modified: 2010-11-09 - 207KB
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- 8:
Microsoft Word - Executive Summary-Schenkel-Nov01-10
- 1 Participants only: Not for distribution. 2nd Deterministic Doping Workshop November 12, 2010, UC Berkeley Executive Summary Title: Deterministic doping by single ion ...
URL: https://www.src.org/...100-03-executive-summary-schenkel.pdf
Modified: 2010-11-09 - 71KB
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