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CFM&TCM – CFM & Total Chemical Management

Content Type
Patent Filings 2
Other 1

SRC Program
GRC 3

Center
ACE4S 1
CAIST 1
CDADIC 1
CEMPI 1
CHIRP 1
EBSM 1
IPC 1
NCRC 1
TxACE 1

GRC Science Area
LIT – Lithography Sciences 3
MBP – Materials & Bulk Processes... 3
MPS – Material & Process Science... 2
CADTS – Computer Aided Design & ... 1
CSR – Cross-disciplinary Semicon... 1
DES – Design Sciences 1
DS – Device Sciences 1
ES-H – Environmental Safety & He... 1
FAC – Factory Sciences 1
GEN – General 1
ICSS – Integrated Circuit & Syst... 1
INT – Interconnect Sciences 1
IPS – Interconnect & Packaging S... 1
ISA – Industrial Support Activit... 1
MFG – Manufacturing Sciences 1
MFGPS – Manufacturing Process Sc... 1
MIC – Microstructure Sciences 1
MSS – Manufacturing Systems Scie... 1
NIS – Nanostructure & Integratio... 1
NMS – Nanomanufacturing Sciences 1
PID – Process Integration & Devi... 1
PKG – Packaging Sciences 1
SMS – Semiconductor Modeling & S... 1
SRCEA – SRC Education Alliance 1
TT – Technology Transfer 1

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1: Semiconductor Research Corporation - SRC
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2: Langmuir Probe System for Radio Frequency Excited Plasma Processing...
Langmuir Probe System for Radio Frequency Excited Plasma Processing System Application Type: Utility Patent Number: 5339039 Country: United States Status: Filed on 29-Sep-1992, ...
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Apparatus and Method for Shaping and Detecting a Particle Beam Application Type: Utility Patent Number: 5270542 Country: United States Status: Filed on 31-Dec-1992, Issued on ...
URL: https://www.src.org/library/patent/p0197/
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