Questions?
[x] Thrust/Theme
MTMP – Metrology Tools Matls & Processes

[x] GRC Science Area
LIT – Lithography Sciences

[x] SRC Program
GRC

Content Type
Patent Filings 3
Other 1

Center
ACE4S 1
CAIST 1
CDADIC 1
CEMPI 1
CHIRP 1
EBSM 1
IPC 1
NCRC 1
TxACE 1

1 through 4 of 4 similar documents, best matches first.   
1: Methods and Compositions for Imaging Acids in Chemically Amplified...
Methods and Compositions for Imaging Acids in Chemically Amplified Photoresists Using pH-Dependent Fluorophores Application Type: Divisional Patent Number: 6566030 Country: United ...
URL: https://www.src.org/library/patent/p0224/
Modified: 2003-05-20 - 23KB
Find Similar Documents
2: Methods and Compositions for Imaging Acids in Chemically Amplified...
Methods and Compositions for Imaging Acids in Chemically Amplified Photoresists Using pH-Dependent Fluorophores Application Type: Utility Patent Number: 6376149 Country: United ...
URL: https://www.src.org/library/patent/p0088/
Modified: 2002-04-23 - 23KB
Find Similar Documents
3: Methods, Apparatus and Computer Program Products for Self-Calibrating...
Methods, Apparatus and Computer Program Products for Self-Calibrating Two-Dimensional Metrology Stages Application Type: Utility Patent Number: 5798947 Country: United States ...
URL: https://www.src.org/library/patent/p0017/
Modified: 1998-08-25 - 22KB
Find Similar Documents
4: Semiconductor Research Corporation - SRC
GRC GRC Global Research Collaboration Our motivation is to fund the most relevant and critical research for international companies, so we go where the best university talent ...
URL: https://www.src.org/program/grc/
Modified: 2023-10-10 - 33KB
Find Similar Documents