Questions?
[x] GRC Science Area
MPS – Material & Process Sciences

Content Type
Patent Filings 9

SRC Program
GRC 9

Thrust/Theme
Pat(MPS) – Patterning 5
Back End Processes 2
BEP – Back End Processes 1

1 through 9 of 9 similar documents, best matches first.   
1: Patterning Methods and Systems Using Reflected Interference Patterns...
Patterning Methods and Systems Using Reflected Interference Patterns Application Type: Continuation Patent Number: 6967067 Country: United States Status: Filed on 9-Mar-2004, ...
URL: https://www.src.org/library/patent/p0428/
Modified: 2005-11-22 - 22KB
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2: Patterning Methods and Systems Using Reflected Interference Patterns...
Patterning Methods and Systems Using Reflected Interference Patterns Application Type: Foreign National Patent Number: NI-154578 Country: Taiwan Status: Filed on 21-Feb-2001, ...
URL: https://www.src.org/library/patent/p0267/
Modified: 2002-05-01 - 22KB
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3: Patterning Methods and Systems Using Reflected Interference Patterns...
Patterning Methods and Systems Using Reflected Interference Patterns Application Type: Utility Patent Number: 6730443 Country: United States Status: Filed on 12-Feb-2001, Issued on ...
URL: https://www.src.org/library/patent/p0195/
Modified: 2004-05-04 - 22KB
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4: System and Method Converting the Polarization State of an Optical...
System and Method Converting the Polarization State of an Optical Beam into an Inhomogenously Polarized State Application Type: Utility Patent Number: 7414786 Country: United ...
URL: https://www.src.org/library/patent/p0496/
Modified: 2008-08-19 - 24KB
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5: Positive Resist Pattern Formation Through Focused Ion Beam Exposure...
Positive Resist Pattern Formation Through Focused Ion Beam Exposure and Surface Barrier Silylation Application Type: Continuation (in part) Patent Number: 5362606 Country: United ...
URL: https://www.src.org/library/patent/p0060/
Modified: 1994-11-08 - 21KB
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6: Growth of Inorganic Thin Films using Self-Assembled Monolayers...
Growth of Inorganic Thin Films using Self-Assembled Monolayers as Nucleation Sites Application Type: Utility Patent Number: 7829150 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p1139/
Modified: 2010-11-09 - 22KB
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7: Apparatus for Production of an Inhomogeneously Polarized Optical...
Apparatus for Production of an Inhomogeneously Polarized Optical Beam for Use in Illumination and a Method Thereof Application Type: Utility Patent Number: 7151632 Country: United ...
URL: https://www.src.org/library/patent/p0203/
Modified: 2006-12-19 - 22KB
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8: Oxidation Resistant High Conductivity Copper Layers For Microelectroni...
Oxidation Resistant High Conductivity Copper Layers For Microelectronic Applications and Process of Making Same Application Type: Divisional Patent Number: 5959358 Country: United ...
URL: https://www.src.org/library/patent/p0054/
Modified: 1999-09-28 - 24KB
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9: Passivated Copper Conductive Layers for Microelectronic Applications...
Passivated Copper Conductive Layers for Microelectronic Applications and Methods of Manufacturing Same Application Type: Utility Patent Number: 5766379 Country: United States ...
URL: https://www.src.org/library/patent/p0015/
Modified: 1998-06-16 - 24KB
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1 through 9 of 9 similar documents, best matches first.