Questions?
[x] GRC Science Area
LIT – Lithography Sciences

[x] Content Type
Patent Filings

SRC Program
GRC 8

Thrust/Theme
CFM&TCM – CFM & Total Chemical M... 4
Masks 2
PAT – Patterning 2

1 through 8 of 8 similar documents, best matches first.   
1: CHARACTERIZING ABERRATIONS IN AN IMAGING LENS AND APPLICATIONS...
CHARACTERIZING ABERRATIONS IN AN IMAGING LENS AND APPLICATIONS TO VISUAL TESTING AND INTEGRATED CIRCUIT MASK ANALYSIS Application Type: Utility Patent Number: 7030997 Country: ...
URL: https://www.src.org/library/patent/p0302/
Modified: 2006-04-18 - 22KB
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2: Method of Locating Areas in an Image Such as a Photo Mask Layout...
Method of Locating Areas in an Image Such as a Photo Mask Layout That Are Sensitive to Residual Processing Effects Application Type: Continuation (in part) Patent Number: 7155698 ...
URL: https://www.src.org/library/patent/p0409/
Modified: 2006-12-26 - 22KB
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3: Stress-Free Mount for Imaging Mask (Patent P0056) - SRC
Stress-Free Mount for Imaging Mask Application Type: Divisional Patent Number: 5675403 Country: United States Status: Filed on 28-May-1996, Issued on 7-Oct-1997, Patent Expired ...
URL: https://www.src.org/library/patent/p0056/
Modified: 1997-10-07 - 24KB
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4: Stress-Free Mount for Imaging Mask (Patent P0076) - SRC
Stress-Free Mount for Imaging Mask Application Type: Utility Patent Number: 5536559 Country: United States Status: Filed on 22-Nov-1994, Issued on 16-Jul-1996, Patent Expired ...
URL: https://www.src.org/library/patent/p0076/
Modified: 1996-07-16 - 24KB
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5: Langmuir Probe System for Radio Frequency Excited Plasma Processing...
Langmuir Probe System for Radio Frequency Excited Plasma Processing System Application Type: Utility Patent Number: 5339039 Country: United States Status: Filed on 29-Sep-1992, ...
URL: https://www.src.org/library/patent/p0130/
Modified: 1994-08-16 - 22KB
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6: Reactive Membrane for Filtration and Purification of Gases of...
Reactive Membrane for Filtration and Purification of Gases of Impurities and Method Utilizing the Same Application Type: Continuation (in part) Patent Number: 5637544 Country: ...
URL: https://www.src.org/library/patent/p0011/
Modified: 1997-06-10 - 25KB
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7: Reactive Membrane for Filtration and Purification of Gases of...
Reactive Membrane for Filtration and Purification of Gases of Impurities and Method Utilizing the Same Application Type: Divisional Patent Number: 5635148 Country: United States ...
URL: https://www.src.org/library/patent/p0009/
Modified: 1997-06-03 - 25KB
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8: Modification of Polyvinylidene Fluoride Membrane and Method of...
Modification of Polyvinylidene Fluoride Membrane and Method of Filtering Application Type: Utility Patent Number: 5531900 Country: United States Status: Filed on 7-Jul-1994, Issued ...
URL: https://www.src.org/library/patent/p0020/
Modified: 1996-07-02 - 22KB
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1 through 8 of 8 similar documents, best matches first.