High Input/Output Density Optoelectronic Probe Card for Wafer-Level Test of Electrical and Optical Interconnect Components, Methods of Fabrication, and Methods of Use

• Application Type:

  Utility

  Patent Number:

  7554347

  Country:

  United States

  Status:

  Filed on 17-Mar-2003, Issued on 30-Jun-2009, Patent Abandoned

  Organization:

  Georgia Institute of Technology

  SRC Filing ID:

  P0361

Inventors

• Tony Victor Mule (Georgia Tech)
• Hiren D. Thacker (Georgia Tech)
• Muhannad S. Bakir (Georgia Tech)
• Thomas K. Gaylord (Georgia Tech)
• Kevin P. Martin (Georgia Tech)
• Paul A. Kohl (Georgia Tech)
• James D. Meindl (Georgia Tech)