Method of Forming a Multi-Layer Semiconductor Structure Incorporating a Processing Handle Member
Inventors
- L. Rafael Reif (MIT)
- Andy Fan (MIT)
- Kuan-Neng Chen (IBM)
- Chuan Seng Tan (Nanyang Tech Univ.)
Related Patents
Method of Forming a Multi-Layer Semiconductor Structure Incorporating a Processing Handle Member
Kuan-Neng Chen (IBM); Andy Fan (MIT); L. Rafael Reif (MIT); Chuan Seng Tan (Nanyang Tech Univ.)Patent Application Abandoned
Application Type: Divisional