Passivation of Silicon Dioxide Defects for Atomic Layer Deposition
Inventors
- Steven Wolf (UC/San Diego)
- Michael C. Breeden (UC/San Diego)
- Ashay Anurag (UC/San Diego)
- Andrew Kummel (UC/San Diego)
Related Patents
Passivation of Silicon Dioxide Defects for Selective Atomic Layer Deposition
Ashay Anurag (UC/San Diego); Michael C. Breeden (UC/San Diego); Andrew Kummel (UC/San Diego); Steven Wolf (UC/San Diego)Patent Application Expired
Application Type: Provisional