Questions?
[x] GRC Science Area
MPS – Material & Process Sciences

Content Type
Patent Filings 119
Other 1

SRC Program
GRC 120
FCRP 2

Center
EBSM 4
FENA 2
ACE4S 1
CAIST 1
CDADIC 1
CEMPI 1
CHIRP 1
IPC 1
NCRC 1
TxACE 1

Thrust/Theme
PAT – Patterning 24
Factory Systems 18
Pat(MPS) – Patterning 16
BEP – Back End Processes 8
Back End Processes 8
ESH – Environment Safety and Hea... 4
DCMOS – Digital CMOS Technologie... 3
PatMat – Patterning Materials 3
CFM&TCM – CFM & Total Chemical M... 2
Doping Technologies 2
Front End Processes 2
Materials 2
ADS – Alternative Device Structu... 1
AIHW – Artificial Intelligence H... 1
AMS – Analog and Mixed-Signal De... 1
AMS-CSD – Analog/Mixed-Signal Ci... 1
AdvTech – Advanced Technology 1
Advanced Bipolar SOI-MOS Transis... 1
Advanced Devices 1
Advanced Devices & Technologies 1
Advanced Technology Option 1
Analysis Design & Simulation 1
C&S – Controls and Sensing 1
CADT – Computer-Aided Design and... 1
CD – Circuit Design 1
CM – Compact Modeling 1
CSR – Cross-Disciplinary Semicon... 1
Contamination Control 1
Cost Reduction 1
DE – Design Environment 1
DSMS – Device Sciences Modeling ... 1
DV – Design Verification 1
Defect Reduction 1
Deposition 1
DesSyn – Design Synthesis 1
DesTech – Design Techniques 1
EP3C – Efficiency and Performanc... 1
Equip Automation & Process Contr... 1
Equip – Equipment 1
Equip. Auto. and Process Control 1
FACSYS – Factory Systems 1
FAM – Factory Automation & Manag... 1
FEOL – FEOL Processes 1
FacOps – Factory Operations 1
HWS – Hardware Security 1
Heat Signal & Power Distribution 1
Heat Signal Power 1
I3T – Innovative and Intelligent... 1
ISD – Integrated System Design 1
Interconnect Architecture 1
LMD – Logic and Memory Devices 1
LPD – Logic & Physical Design 1
Lithography 1
Logic Design 1
Logistics & Modeling/Simulation 1
MT – Memory Technologies 1
MTMP – Metrology Tools Matls & P... 1
Masks 1
Materials & Measurements 1
Metrology 1
Modeling & Simulation 1
Modeling & TCAD 1
Multi-level Interconnect 1
NCR – Non-Classical CMOS Researc... 1
NEM – Nanoengineered Materials 1
NMP – Nanomanufacturing Material... 1
PKG – Packaging 1
PMM – Packaging Materials and Me... 1
PMS – Packaging Modeling and Sim... 1
PS/E – Process Simplification/En... 1
Package & Electrical Design 1
Package Reliability 1
Packaging & Interconnect Systems 1
Packaging Materials Interfaces 1
PatSys – Patterning Systems 1
PhyDes – Physical Design 1
Physical Design 1
Plasma Etch 1
Process Architecture 1
Processes – Processes 1
Quality & Reliability 1
Rapid Yield Learning 1
Reliability 1
Resist 1
SLD – System Level Design 1
SemiSynBio – Semiconductor Synth... 1
Semiconductor Modeling & Simulat... 1
Signal/Power Management 1
Substrates 1
Synthesis & Verification 1
TCAD-MBPS 1
TM – Thermal Management 1
TT – Test & Testability 1
TechCAD – Technology CAD 1
VER – Verification 1

31 through 60 of 120 similar documents, best matches first.   
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31: Methods and Systems for Transmission and Detection of Free Radicals...
Methods and Systems for Transmission and Detection of Free Radicals Application Type: Utility Patent Number: 11592394 Country: United States Status: Filed on 14-Aug-2017, Issued on ...
URL: https://www.src.org/library/patent/p2131/
Modified: 2023-12-28 - 22KB
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32: Process for the Photochemical Vapor Deposition of Aromatic Polymers...
Process for the Photochemical Vapor Deposition of Aromatic Polymers Application Type: Utility Patent Number: 4588609 Country: United States Status: Filed on 26-Nov-1984, Issued on ...
URL: https://www.src.org/library/patent/p0172/
Modified: 1986-05-13 - 20KB
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33: Method for Making a Thin Film of Polymer (Patent P0170) - SRC
Method for Making a Thin Film of Polymer Application Type: Utility Patent Number: 4925612 Country: United States Status: Filed on 5-Sep-1989, Issued on 15-May-1990, Patent Expired ...
URL: https://www.src.org/library/patent/p0170/
Modified: 1990-05-15 - 20KB
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34: Nanostructures Including Controllably positioned and Aligned...
Nanostructures Including Controllably positioned and Aligned Synthetic Nanotubes, and related methods Application Type: Foreign National Patent Number: 110957 Country: Singapore ...
URL: https://www.src.org/library/patent/p0554/
Modified: 2007-08-31 - 23KB
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35: Process for Producing Thin Film Polymer Film by Pulsed Laser...
Process for Producing Thin Film Polymer Film by Pulsed Laser Evaporation Application Type: Utility Patent Number: 5288528 Country: United States Status: Filed on 2-Feb-1993, Issued ...
URL: https://www.src.org/library/patent/p0167/
Modified: 1994-02-22 - 20KB
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36: Massively Parallel Addressable Array Cathode (Patent P0260) ...
Massively Parallel Addressable Array Cathode Application Type: Utility Patent Number: 5363021 Country: United States Status: Filed on 12-Jul-1993, Issued on 8-Nov-1994, Patent ...
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Modified: 1994-11-08 - 20KB
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37: Confined Lateral Selective Epitaxial Growth (Patent P0169) -...
Confined Lateral Selective Epitaxial Growth Application Type: Utility Patent Number: 4948456 Country: United States Status: Filed on 9-Jun-1989, Issued on 14-Aug-1990, Patent ...
URL: https://www.src.org/library/patent/p0169/
Modified: 1990-08-14 - 20KB
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38: Diffusion Barrier for Copper Features (Patent P0145) - SRC
Diffusion Barrier for Copper Features Application Type: Utility Patent Number: 5164332 Country: United States Status: Filed on 15-Mar-1991, Issued on 17-Nov-1992, Patent Expired ...
URL: https://www.src.org/library/patent/p0145/
Modified: 1992-11-17 - 20KB
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39: Conductive Pattern Layer Structure and Method of Producing the...
Conductive Pattern Layer Structure and Method of Producing the Conductive Pattern Layer Structure Application Type: Utility Patent Number: 5284696 Country: United States Status: ...
URL: https://www.src.org/library/patent/p0168/
Modified: 1994-02-08 - 20KB
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40: Surface Barrier Silylation of Novolak Film Without Photoactive...
Surface Barrier Silylation of Novolak Film Without Photoactive Additive Patterned with 193 nm Excimer Laser Application Type: Utility Patent Number: 5139925 Country: United States ...
URL: https://www.src.org/library/patent/p0080/
Modified: 1992-08-18 - 20KB
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41: Fabrication of Group III-Nitride Photocathode Having Cs Activation...
Fabrication of Group III-Nitride Photocathode Having Cs Activation Layer Application Type: Continuation (in part) Patent Number: 7455565 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p1082/
Modified: 2008-11-25 - 23KB
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42: Method for Patterning a Radiation Sensitive Layer (Patent P0087...
Method for Patterning a Radiation Sensitive Layer Application Type: Utility Patent Number: 6509138 Country: United States Status: Filed on 12-Jan-2000, Issued on 21-Jan-2003 ...
URL: https://www.src.org/library/patent/p0087/
Modified: 2003-01-21 - 22KB
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43: Reactive Membrane for Filtration and Purification of Gases of...
Reactive Membrane for Filtration and Purification of Gases of Impurities Application Type: Utility Patent Number: 5196380 Country: United States Status: Filed on 6-Jun-1991, Issued ...
URL: https://www.src.org/library/patent/p0143/
Modified: 1993-03-23 - 21KB
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44: Efficient Narrow Spectral Width Soft X-Ray Discharge Sources...
Efficient Narrow Spectral Width Soft X-Ray Discharge Sources Application Type: Utility Patent Number: 5499282 Country: United States Status: Filed on 2-May-1994, Issued on ...
URL: https://www.src.org/library/patent/p0180/
Modified: 1996-03-12 - 20KB
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45: Combined Ion and Molecular Beam Apparatus and Method for Depositing...
Combined Ion and Molecular Beam Apparatus and Method for Depositing Materials Application Type: Utility Patent Number: 4800100 Country: United States Status: Filed on 27-Oct-1987, ...
URL: https://www.src.org/library/patent/p0171/
Modified: 1989-01-24 - 21KB
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46: Solventless, Resistless, Direct Dielectric Patterning (Patent...
Solventless, Resistless, Direct Dielectric Patterning Application Type: Foreign National Patent Number: 171285 Country: Taiwan Status: Filed on 9-Jan-2001, Issued on 2-Jun-2003, ...
URL: https://www.src.org/library/patent/p0207/
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47: Solventless, Resistless, Direct Dielectric Patterning (Patent...
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URL: https://www.src.org/library/patent/p0308/
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48: Deposition of Metals on Stepped Surfaces (Patent P0114) - SRC
Deposition of Metals on Stepped Surfaces Application Type: Utility Patent Number: 4944961 Country: United States Status: Filed on 5-Aug-1988, Issued on 31-Jul-1990, Patent Expired ...
URL: https://www.src.org/library/patent/p0114/
Modified: 1990-07-31 - 21KB
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49: Measurement of Ultrafine Particle Size Distributions (Patent...
Measurement of Ultrafine Particle Size Distributions Application Type: Utility Patent Number: 5072626 Country: United States Status: Filed on 14-Jul-1989, Issued on 17-Dec-1991, ...
URL: https://www.src.org/library/patent/p0102/
Modified: 1991-12-17 - 21KB
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50: Multiple-Thickness Gate Oxide Formed by Oxygen Implantation ...
Multiple-Thickness Gate Oxide Formed by Oxygen Implantation Application Type: Foreign National Patent Number: NI154458 Country: Taiwan Status: Filed on 1-Dec-1999, Issued on ...
URL: https://www.src.org/library/patent/p0211/
Modified: 2003-05-07 - 26KB
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51: Non-Crystalline Oxides for Use in Microelectronic, Optical and...
Non-Crystalline Oxides for Use in Microelectronic, Optical and Other Applications Application Type: Foreign National Patent Number: 195870 Country: Taiwan Status: Filed on ...
URL: https://www.src.org/library/patent/p0227/
Modified: 2004-11-02 - 27KB
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52: Optical Proximity Correction Using Regression (Patent P1118)...
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URL: https://www.src.org/library/patent/p1118/
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53: Method and Apparatus for Dual Modulation Laser Spectroscopy ...
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URL: https://www.src.org/library/patent/p0058/
Modified: 1997-06-03 - 21KB
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54: Process for Metal Deposition for Microelectronic Interconnections...
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55: Apparatus and Method for Determining Power in Plasma Processing...
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URL: https://www.src.org/library/patent/p0140/
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56: Molecular Glass Photoresists (Patent P0566) - SRC
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URL: https://www.src.org/library/patent/p0566/
Modified: 2008-11-18 - 23KB
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57: Method for Making Masks (Patent P0064) - SRC
Method for Making Masks Application Type: Utility Patent Number: 5326659 Country: United States Status: Filed on 5-Mar-1992, Issued on 5-Jul-1994, Patent Expired Organization: ...
URL: https://www.src.org/library/patent/p0064/
Modified: 1994-07-05 - 21KB
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58: Step and Flash Imprint Lithography (Patent P0264) - SRC
Step and Flash Imprint Lithography Application Type: Utility Patent Number: 6719915 Country: United States Status: Filed on 19-Jul-2001, Issued on 13-Apr-2004 Organization: ...
URL: https://www.src.org/library/patent/p0264/
Modified: 2004-04-13 - 25KB
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59: Step and Flash Imprint Lithography (Patent P0245) - SRC
Step and Flash Imprint Lithography Application Type: European Patent Office Patent Number: 1228401 Status: Filed on 3-Mar-2000, Issued on 10-Aug-2005 Organization: University of ...
URL: https://www.src.org/library/patent/p0245/
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60: Step and Flash Imprint Lithography (Patent P0238) - SRC
Step and Flash Imprint Lithography Application Type: Utility Patent Number: 6334960 Country: United States Status: Filed on 11-Mar-1999, Issued on 1-Jan-2002, Patent Expired ...
URL: https://www.src.org/library/patent/p0238/
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31 through 60 of 120 similar documents, best matches first.   
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